As the input (pre-exposure photoresist coating) and output (post-exposure graphics development) of the lithography machine, the wafer is transmitted and processed between the various systems mainly through the manipulator, so as to complete the photoresist coating, curing, developing, hardening and other processes of the wafer, which not only directly affects the formation of fine exposure patterns in the photolithography process. The graphics quality of the development process also has a profound impact on the results of the graphics transfer in the subsequent etching and ion implantation processes, and is an indispensable key processing equipment in the integrated circuit manufacturing process
Quality
Standard domestic and foreign advanced technology and indicators, quality system certification
Price
Customize the best price and service
Service
Localization service team, quick response to customers, on-site technical support, full life cycle careDelivery time
Rich types of equipment reserve, flexible allocation of resources